{"id":627,"count":1,"description":"

Cung C\u1ea5p H\u00f3a Ch\u1ea5t Kh\u1eafc Ch\u1ea5t L\u01b0\u1ee3ng Cao Cho Ng\u00e0nh B\u00e1n D\u1eabn<\/strong><\/h1>\r\nH\u00f3a ch\u1ea5t kh\u1eafc l\u00e0 m\u1ed9t ph\u1ea7n thi\u1ebft y\u1ebfu trong quy tr\u00ecnh ch\u1ebf t\u1ea1o vi m\u1ea1ch v\u00e0 linh ki\u1ec7n \u0111i\u1ec7n t\u1eed, gi\u00fap lo\u1ea1i b\u1ecf ch\u00ednh x\u00e1c c\u00e1c l\u1edbp v\u1eadt li\u1ec7u kh\u00f4ng c\u1ea7n thi\u1ebft tr\u00ean b\u1ec1 m\u1eb7t wafer b\u00e1n d\u1eabn. V\u1edbi y\u00eau c\u1ea7u kh\u1eaft khe v\u1ec1 \u0111\u1ed9 tinh khi\u1ebft v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c trong s\u1ea3n xu\u1ea5t, vi\u1ec7c l\u1ef1a ch\u1ecdn nh\u00e0 cung c\u1ea5p h\u00f3a ch\u1ea5t \u0111\u1ea1t chu\u1ea9n l\u00e0 y\u1ebfu t\u1ed1 quy\u1ebft \u0111\u1ecbnh \u0111\u1ebfn hi\u1ec7u su\u1ea5t v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m.<\/span>\r\n\r\nL\u1ed9c Thi\u00ean t\u1ef1 h\u00e0o cung c\u1ea5p danh m\u1ee5c h\u00f3a ch\u1ea5t kh\u1eafc<\/a> c\u0169ng nh\u01b0 h\u00f3a ch\u1ea5t b\u00e1n d\u1eabn<\/a> \u0111\u1ea1t ch\u1ee9ng ch\u1ec9 qu\u1ed1c t\u1ebf trong ng\u00e0nh b\u00e1n d\u1eabn nh\u01b0 ISO 9001, ISO 14001, \u0111\u1ea3m b\u1ea3o t\u1ed1i \u0111a v\u1ec1 ch\u1ea5t l\u01b0\u1ee3ng, an to\u00e0n v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh cho quy tr\u00ecnh s\u1ea3n xu\u1ea5t c\u1ee7a doanh nghi\u1ec7p.<\/span>\r\n

\ud83d\udcde Hotline:<\/strong> 0979 89 1929<\/a> | <\/span>\ud83d\udce9 Email:<\/strong> locthien@locthien.vn<\/a> |<\/span>\ud83c\udf10 Website:<\/strong><\/span> hoachatlocthien.com<\/span><\/a><\/p>\r\n\r\n

C\u00e1c h\u00f3a ch\u1ea5t kh\u1eafc (Etching Chemicals) ph\u1ed5 bi\u1ebfn trong ng\u00e0nh B\u00e1n D\u1eabn<\/span><\/h2>\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n\r\n
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T\u00ean H\u00f3a Ch\u1ea5t<\/strong><\/p>\r\n<\/td>\r\n

C\u00f4ng Th\u1ee9c H\u00f3a H\u1ecdc<\/strong><\/td>\r\n\r\n

\u1ee8ng D\u1ee5ng<\/strong><\/p>\r\n<\/td>\r\n<\/tr>\r\n

Hydrofluoric Acid (HF)<\/span><\/td>\r\nHF<\/span><\/td>\r\nKh\u1eafc SiO\u2082 trong c\u00e1c l\u1edbp oxide, x\u1eed l\u00fd b\u1ec1 m\u1eb7t wafer trong qu\u00e1 tr\u00ecnh kh\u1eafc \u01b0\u1edbt.<\/span><\/td>\r\n<\/tr>\r\n
Buffered Oxide Etch (BOE)<\/span><\/td>\r\nHF + NH\u2084F<\/span><\/td>\r\n\u0110i\u1ec1u ch\u1ec9nh t\u1ed1c \u0111\u1ed9 kh\u1eafc SiO\u2082 ch\u00ednh x\u00e1c, \u0111\u1ea3m b\u1ea3o b\u1ec1 m\u1eb7t kh\u1eafc \u0111\u1ed3ng \u0111\u1ec1u.<\/span><\/td>\r\n<\/tr>\r\n
Kh\u00ed Plasma (Cl\u2082, SF\u2086, CF\u2084)<\/span><\/td>\r\nCl\u2082, SF\u2086, CF\u2084<\/span><\/td>\r\nH\u1ed7 tr\u1ee3 quy tr\u00ecnh kh\u1eafc kh\u00f4, t\u1ea1o ra c\u00e1c chi ti\u1ebft si\u00eau nh\u1ecf trong vi m\u1ea1ch.<\/span><\/td>\r\n<\/tr>\r\n
Nitrogen Trifluoride (NF\u2083)<\/span><\/td>\r\nNF\u2083<\/span><\/td>\r\nL\u00e0m s\u1ea1ch silicon nitride v\u00e0 silicon dioxide trong m\u00f4i tr\u01b0\u1eddng plasma.<\/span><\/td>\r\n<\/tr>\r\n
Sulfur Hexafluoride (SF\u2086)<\/span><\/td>\r\nSF\u2086<\/span><\/td>\r\nKh\u1eafc silicon hi\u1ec7u qu\u1ea3 trong s\u1ea3n xu\u1ea5t MEMS v\u00e0 vi c\u01a1 \u0111i\u1ec7n t\u1eed.<\/span><\/td>\r\n<\/tr>\r\n
Phosphoric Acid (H\u2083PO\u2084)<\/span><\/td>\r\nH\u2083PO\u2084<\/span><\/td>\r\nKh\u1eafc l\u1edbp silicon nitride trong s\u1ea3n xu\u1ea5t DRAM v\u00e0 CMOS.<\/span><\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n[caption id=\"attachment_4715\" align=\"aligncenter\" width=\"500\"]\"H\u00f3a Quy tr\u00ecnh - H\u00f3a Ch\u1ea5t Kh\u1eafc trong ng\u00e0nh b\u00e1n d\u1eabn[\/caption]\r\n

Ph\u00e2n Lo\u1ea1i H\u00f3a Ch\u1ea5t Kh\u1eafc Trong Ng\u00e0nh B\u00e1n D\u1eabn<\/strong><\/h2>\r\nQuy tr\u00ecnh kh\u1eafc trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn \u0111\u01b0\u1ee3c chia th\u00e0nh hai lo\u1ea1i ch\u00ednh d\u1ef1a tr\u00ean ph\u01b0\u01a1ng ph\u00e1p s\u1eed d\u1ee5ng: h\u00f3a ch\u1ea5t kh\u1eafc \u01b0\u1edbt<\/strong> v\u00e0 h\u00f3a ch\u1ea5t kh\u1eafc kh\u00f4<\/strong>. M\u1ed7i lo\u1ea1i c\u00f3 \u0111\u1eb7c \u0111i\u1ec3m, \u1ee9ng d\u1ee5ng v\u00e0 \u01b0u \u0111i\u1ec3m ri\u00eang ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c c\u00f4ng \u0111o\u1ea1n c\u1ee5 th\u1ec3 trong ch\u1ebf t\u1ea1o vi m\u1ea1ch v\u00e0 linh ki\u1ec7n \u0111i\u1ec7n t\u1eed.\r\n

1. Wet Etching Chemicals (H\u00f3a Ch\u1ea5t Kh\u1eafc \u01af\u1edbt)<\/strong><\/h3>\r\n

\u0110\u1eb7c \u0111i\u1ec3m<\/strong>:<\/h4>\r\n