H2O2 Electronic Grade vs Industrial: Purity Comparison, SEMI Spec & Semiconductor Applications
H2O2 Electronic Grade vs Industrial: Purity Comparison for Semiconductor Manufacturing
Hydrogen peroxide electronic grade (CAS 7722-84-1, 30-32%) is purified through vacuum distillation, ion exchange, and membrane filtration to achieve metal impurity levels from ppb to ppt. Industrial grade H2O2 50% is used for water treatment and general industry without strict metal control. Semiconductor fabs in Vietnam — from OSAT to packaging to manufacturing — require H2O2 meeting SEMI specs for RCA clean, Si etching, and photoresist stripping. Loc Thien supplies H2O2 electronic grade imported from Japan/Korea, with lot-specific ICP-MS COA.
SEMI C30-1110 Classification (5 Grades)
| Parameter | Grade 1 | Grade 2 | Grade 3 | Grade 4 | Grade 5 |
|---|---|---|---|---|---|
| Chloride (Cl⁻) | 2 ppm max | 200 ppb max | 200 ppb max | 30 ppb max | 30 ppb max |
| TOC | 20 ppm max | 20 ppm max | 20 ppm max | 10 ppm max | 10 ppm max |
| Al, Na, Fe | 1 ppm max | 10 ppb max | 1 ppb max | 100 ppt max | 10 ppt max |
Grade 2 is the minimum for most semiconductor applications. Grade 5 requires <10 ppt per element for sub-7nm nodes. Analysis method: ICP-MS mandatory for Grade 4-5, GF-AAS sufficient for Grade 2-3.
Applications in Semiconductor Manufacturing
H2O2 electronic grade is the main consumable chemical in fab wet processing: RCA clean (SC-1 and SC-2), silicon etching, photoresist stripping with SPM (H₂SO₄/H₂O₂), and post-CMP residue removal.
RCA Standard Clean
SC-1 (NH₄OH/H₂O₂/H₂O = 1:1:5 at 75-80°C, 10 min) removes organic residues and particles. SC-2 (HCl/H₂O₂/H₂O = 1:1:6) removes metal ions. Bath life is 45-60 min at 75°C.
FAQ
What concentration is H2O2 electronic grade?
30-32% by weight, lower than industrial H2O2 (50%). This concentration optimizes stability for semiconductor applications.
How to distinguish electronic grade from industrial?
Via COA: electronic grade lists metal impurities per element (Al, Fe, Na, Cu) at ppb or ppt levels with SEMI C30 certification.
Does Loc Thien supply H2O2 electronic grade?
Yes. Loc Thien imports H2O2 electronic grade from Japan and Korea, covering SEMI Grade 2 through Grade 5. Lot-specific ICP-MS COA included.
🛒 Need H2O2 Electronic Grade? Get quote — SEMI Grade 2–5, lot-specific ICP-MS COA, ISO tank/IBC/PE drum nationwide. Hotline 0979 891 929.
